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Simultaneous laser crystallization of multiple silicon films for TFTs
Summary
James Im, Ph.D.
Technology Benefits
Produces uniform semiconductor filmsCost efficient manufacturing method using lasersFast production of polycrystalline semiconductor filmsCompatible with Excimer Laser Annealing (ELA) and Sequential Lateral Solidification (SLS) techniquesPatent Information:Patent Pending (US 20140001164)Tech Ventures Reference: IR M03-052
Technology Application
High performance TFTsLiquid crystal displaysOLEDs3-D integrated circuitsSemiconductor circuits
Detailed Technology Description
James Im, Ph.D.
Country/Region
USA
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