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Shell-type Micromechanical Actuator and Resonator

Detailed Technology Description
Cornell researchers have developed a novel MEMS actuator useable as a high frequency micromechanical resonator.
Others

Patent:  7,812,502
*Abstract

Cornell researchers have developed a novel MEMS actuator useable as a high frequency micromechanical resonator. Unlike other resonators, the device requires only one structural layer, and can be constructed as a small concave segment of a thin shell sphere as well as other designs. In-plane stress/strain in the device, created by laser driven local heating or other input, results in out-of-plane motion. Large amplitude vibrations have been demonstrated at frequencies above 10 MHz. The device promises to find application in a variety of RF applications.

                       

Potential Applications

  • RF MEMS
  • Wireless communication

  

Advantages

  • Low-cost, simple, CMOS-compatible fabrication
  • Adaptable, high frequency oscillations with a variety of vibrating modes
*Licensing
Martin Teschlmt439@cornell.edu(607) 254-4454
Country/Region
USA

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