Shell-type Micromechanical Actuator and Resonator
- 详细技术说明
- Cornell researchers have developed a novel MEMS actuator useable as a high frequency micromechanical resonator.
- *Abstract
-
Cornell researchers have developed a novel MEMS actuator useable as a high frequency micromechanical resonator. Unlike other resonators, the device requires only one structural layer, and can be constructed as a small concave segment of a thin shell sphere as well as other designs. In-plane stress/strain in the device, created by laser driven local heating or other input, results in out-of-plane motion. Large amplitude vibrations have been demonstrated at frequencies above 10 MHz. The device promises to find application in a variety of RF applications.
Potential Applications
- RF MEMS
- Wireless communication
Advantages
- Low-cost, simple, CMOS-compatible fabrication
- Adaptable, high frequency oscillations with a variety of vibrating modes
- *Licensing
- Martin Teschlmt439@cornell.edu(607) 254-4454
- 其他
-
Patent: 7,812,502
- 国家/地区
- 美国
欲了解更多信息，请点击 这里
