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Waveguide-integrated Photodiode in Deposited Silicon

Detailed Technology Description

This invention is a photodiode in polycrystalline silicon (polysilicon), a standard deposited material that can be integrated in the CMOS material stack.

Others

K. Preston, Y.H. Lee, M. Zhang, and M. Lipson, "Waveguide-integrated telecom-wavelength photodiode in deposited silicon," Opt. Lett. 36,52-54 (2011).
K. Preston, M. Zhang, and M. Lipson, "Waveguide-Integrated Photodiode in Deposited Silicon,"Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2010), paper IWF4.
Issued US patents 8,861,909; 9,153,715

Country/Region

USA

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