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Wafer-Level Micro-Glass Blowing

Technology Application

Microscopic gas confinement chambers, micro-lenses, optical switches, laser fusion targets, magnetic shielding, medication capsules, lab-on-a-chip, drug delivery systems

Detailed Technology Description

This invention describes a process for shaping glass on a wafer scale and how multiple micro-glass spheres can be formed simultaneously on a silicon substrate. These wafer attached spheres allow for integration with conventional micro-fabricated components and can be filled with any type of gas in post-fabrication.

Supplementary Information

Patent Number: US7694531B2
Application Number: US2006526436A
Inventor: Eklund, E. Jesper | Shkel, Andrei M.
Priority Date: 27 Sep 2005
Priority Number: US7694531B2
Application Date: 25 Sep 2006
Publication Date: 13 Apr 2010
IPC Current: C03B001910 | B29D002200 | B29D002204
US Class: 065106 | 0650211 | 065022 | 264041 | 2640464 | 264500 | 264574
Assignee Applicant: The Regents of the University of California
Title: Method and apparatus for wafer-level micro-glass-blowing
Usefulness: Method and apparatus for wafer-level micro-glass-blowing
Summary: For fabricating e.g. microscopic gas confinement chamber, vapor cells for nuclear magnetic resonance gyroscopes, micro-lamps, and hydrogen capsules for H-vehicles, laser fusion targets, lab-on-a-chip, medication capsules, and other biomedical devices.
Novelty: Microscopic glass-blowing for fabricating e.g. microscopic gas confinement chamber comprises disposing glass sheet onto substrate covering holes, heating and applying fluidic pressure through holes and forming microspheres on substrate

Industry

Optics

Sub Category

Laser

Application No.

7694531

Others

Tech ID/UC Case

18793/2006-176-0

Related Cases

2006-176-0

*Abstract

Large scale confinement chambers have been created in the past using traditional glass-blowing techniques. However, conventional glass-blowing can only be used to create large components and requires the components to be made one at a time. Micro-glass spheres have previously been fabricated by letting glass particles fall through a temperature-controlled drop tower. While it is possible to create hollow spheres by introducing a blowing agent in the glass, these micro-spheres are not attached to a substrate and are therefore difficult to integrate with micro-machined components on a wafer.

*IP Issue Date

Apr 13, 2010

*Principal Investigator

Name: E. Jesper Eklund

Department:

Name: Andrei Shkel

Department:

Country/Region

USA