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Wafer-Level Micro-Glass Blowing

技術應用: Microscopic gas confinement chambers, micro-lenses, optical switches, laser fusion targets, magnetic shielding, medication capsules, lab-on-a-chip, drug delivery systems

詳細技術說明: This invention describes a process for shaping glass on a wafer scale and how multiple micro-glass spheres can be formed simultaneously on a silicon substrate. These wafer attached spheres allow for integration with conventional micro-fabricated components and can be filled with any type of gas in post-fabrication.

*Abstract: Large scale confinement chambers have been created in the past using traditional glass-blowing techniques. However, conventional glass-blowing can only be used to create large components and requires the components to be made one at a time. Micro-glass spheres have previously been fabricated by letting glass particles fall through a temperature-controlled drop tower. While it is possible to create hollow spheres by introducing a blowing agent in the glass, these micro-spheres are not attached to a substrate and are therefore difficult to integrate with micro-machined components on a wafer.

*Principal Investigation: Name: E. Jesper Eklund
Department:

Name: Andrei Shkel
Department:

附加資料: Patent Number: US7694531B2
Application Number: US2006526436A
Inventor: Eklund, E. Jesper | Shkel, Andrei M.
Priority Date: 27 Sep 2005
Priority Number: US7694531B2
Application Date: 25 Sep 2006
Publication Date: 13 Apr 2010
IPC Current: C03B001910 | B29D002200 | B29D002204
US Class: 065106 | 0650211 | 065022 | 264041 | 2640464 | 264500 | 264574
Assignee Applicant: The Regents of the University of California
Title: Method and apparatus for wafer-level micro-glass-blowing
Usefulness: Method and apparatus for wafer-level micro-glass-blowing
Summary: For fabricating e.g. microscopic gas confinement chamber, vapor cells for nuclear magnetic resonance gyroscopes, micro-lamps, and hydrogen capsules for H-vehicles, laser fusion targets, lab-on-a-chip, medication capsules, and other biomedical devices.
Novelty: Microscopic glass-blowing for fabricating e.g. microscopic gas confinement chamber comprises disposing glass sheet onto substrate covering holes, heating and applying fluidic pressure through holes and forming microspheres on substrate

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