High Speed and High Precision Nanometric Positioner
Using the patented FELA (Flexural-based Electromagnetic Linear Actuator), we have designed and developed a high precision 3-axis nanopositioner that has a working range of up to 5mm. With a mechatronics design approach in mind, the stiff design was generated using a genetic algorithm to achieve an optimized performance specifications. Together with the control electronics analysis, whereby the actuator?s intrinsic capabilities can also be manipulated; we are able to achieve a high bandwidth control performance of up to 10Hz, which is significantly better than the nanopositioner currently in the market. The qualitative performance of the system is validated using our in-house calibration capabilities such as the laser interferometer, the laser Doppler vibrometer and the thermal scanner to measure the accuracy, vibrational disturbances generated and thermal distortion respectively.
Higher throughput Better reliability/yield Configurable in multiple axis (up to 3 axis in a single unit, and up to 6 axis as a system) Dynamic performances can be design and customized to customer requirements
It is suitable for all ultra-precision positioner, whereby a stringent accuracy yet high speed performance is required. Typical applications include precision alignment, optical setup in the electronics and semiconductor industries.
Workspace: up to 2mm in Z and tilting angle of 5 degree in theta X and theta Y Resolution: 100nm positioning resolution, 1 arcsec rotation resolution Speed: 0.25m/s
25-Sep-2014
TO8391
Singapore
