High Speed and High Precision Nanometric Positioner
- 總結
- Using the patented FELA (Flexural-based Electromagnetic Linear Actuator), we have designed and developed a high precision 3-axis nanopositioner that has a working range of up to 5mm. With a mechatronics design approach in mind, the stiff design was generated using a genetic algorithm to achieve an optimized performance specifications. Together with the control electronics analysis, whereby the actuator?s intrinsic capabilities can also be manipulated; we are able to achieve a high bandwidth control performance of up to 10Hz, which is significantly better than the nanopositioner currently in the market. The qualitative performance of the system is validated using our in-house calibration capabilities such as the laser interferometer, the laser Doppler vibrometer and the thermal scanner to measure the accuracy, vibrational disturbances generated and thermal distortion respectively.
- 技術優勢
- Higher throughput Better reliability/yield Configurable in multiple axis (up to 3 axis in a single unit, and up to 6 axis as a system) Dynamic performances can be design and customized to customer requirements
- 技術應用
- It is suitable for all ultra-precision positioner, whereby a stringent accuracy yet high speed performance is required. Typical applications include precision alignment, optical setup in the electronics and semiconductor industries.
- 詳細技術說明
- Workspace: up to 2mm in Z and tilting angle of 5 degree in theta X and theta Y Resolution: 100nm positioning resolution, 1 arcsec rotation resolution Speed: 0.25m/s
- 申請日期
- 25-Sep-2014
- ID號碼
- TO8391
- 國家/地區
- 新加坡
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