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Process and Apparatus for Fabricating Nano-Floatng Gate Memories and Memory Made Thereby

Summary: In a process for fabricating a nano-floating gate memory structure, a substrate and a nanocluster source are firstly provided. The nanocluster source is activated for generating a beam of nanoclusters towards the substrate, and at least part of the nanoclusters are received atop the substrate. Thereby, a plurality of nanoclusters of controllable size are formed atop the substrate.

Industry: Optics

Sub Category: Laser

Others: DAI Jiyan
LU Xubing
LEE Pui-fai

Country/Region: USA

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