Process and Apparatus for Fabricating Nano-Floatng Gate Memories and Memory Made Thereby
- 總結
- In a process for fabricating a nano-floating gate memory structure, a substrate and a nanocluster source are firstly provided. The nanocluster source is activated for generating a beam of nanoclusters towards the substrate, and at least part of the nanoclusters are received atop the substrate. Thereby, a plurality of nanoclusters of controllable size are formed atop the substrate.
- 主要類別
- 光學
- 細分類別
- 激光
- 其他
- DAI Jiyan
LU Xubing
LEE Pui-fai
- 國家/地區
- 美國
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