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Wafer-scale Monolayer Films of Semiconducting Metal Dichalcogenides for High-performance Electronics
Detailed Technology Description
A large scalegrowth technique was invented for producing high quality, continuous monolayer filmsfrom transition metal dichalcogenides (TMDs). The produced TMD films featuresunprecedented uniform structural and electrical properties, an important steptowards development of atomically thin integrated circuitry.
Others
Kang, K.et al., High-mobility three-atom-thick semiconducting films with wafer-scalehomogeneity, Nature 520, 656–660 (2015)
Country/Region
USA
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