AsiaIPEX is a one-stop-shop for players in the IP industry, facilitating IP trade and connection to the IP world. Whether you are a patent owner interested in selling your IP, or a manufacturer looking to buy technologies to upgrade your operation, you will find the portal a useful resource.
Resist Materials for Next Generation Lithography
Detailed Technology Description
Several molecular glasses are disclosed for use as photoresists in semiconductor lithography, especially in the Extreme Ultraviolet (EUV) regime with a radiation range of 10 - 100 nm, enabling features smaller than 0.18 µm.
Others
Country/Region
USA
For more information, please click Here
