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RF MEMS Technology for Fabricating RF MEMS Switches


Technology Benefits

Utilizing this process for example, allows for the integration of RF MEMS switches and antenna systems thereby creating a MEMS integrated smart antenna system on the same substrate. Since this technology enables the use of microwave laminates, high performance substrates can be chosen for system efficiency. In addition, elimination of interconnects and matching circuits enhance performance at reduced cost. These same advantages can be realized in variable capacitors, on-chip inductors, tunable filters, and tunable RF matching circuits.


Detailed Technology Description

University researchers have invented a low-cost, high performance, and substrate independent RF MEMS technology for RF MEMS switch fabrication with high yield and reliability. It is compatible with well established printed circuit board (PCB) technology and allows the choice of any substrate with desired electrical and mechanical properties for a specific communication application, to enhance its performance and reduce cost.


Supplementary Information

Inventor: DAVIS, Cristina | BARDAWEEL, Hamzeh | ZAMURUYEV, Konstantin | DELPLANQUE, Jean-Pierre | KENYON, Nicholas J.
Priority Number: WO2013112893A1
IPC Current: A61B000508
Assignee Applicant: The Regents of the University of California
Title: INTEGRATED CONDENSER FOR COLLECTING DROPLETS | CONDENSEUR INTÉGRÉ POUR COLLECTE DE GOUTTELETTES
Usefulness: INTEGRATED CONDENSER FOR COLLECTING DROPLETS | CONDENSEUR INTÉGRÉ POUR COLLECTE DE GOUTTELETTES
Summary: Integrated condenser for collecting droplets, used in a micro-analyzer for on-chip micro-analysis.
Novelty: Integrated condenser for collecting droplets has outer surface region that facilitates aggregating and moving condensed droplets radially toward center of sampler surface and inner surface region that receives condensed droplets


Industry

Biomedical


Sub Group

Medical Device


Application No.

7084724


Others

Tech ID/UC Case

18883/2002-369-0


Related Cases

2002-369-0


Country/Region

USA

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