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RF MEMS Technology for Fabricating RF MEMS Switches

技術優勢: Utilizing this process for example, allows for the integration of RF MEMS switches and antenna systems thereby creating a MEMS integrated smart antenna system on the same substrate. Since this technology enables the use of microwave laminates, high performance substrates can be chosen for system efficiency. In addition, elimination of interconnects and matching circuits enhance performance at reduced cost. These same advantages can be realized in variable capacitors, on-chip inductors, tunable filters, and tunable RF matching circuits.

詳細技術說明: University researchers have invented a low-cost, high performance, and substrate independent RF MEMS technology for RF MEMS switch fabrication with high yield and reliability. It is compatible with well established printed circuit board (PCB) technology and allows the choice of any substrate with desired electrical and mechanical properties for a specific communication application, to enhance its performance and reduce cost.

*Principal Investigation: Name: Mark Bachman
Department:

Name: Bedri Cetiner
Department:

Name: Hung-ping Chang
Department:

Name: Franco De Flaviis
Department:

Name: Guann Pyng Li
Department:

Name: Jiangyuan(Y.J.) Qian
Department:

附加資料: Inventor: DAVIS, Cristina | BARDAWEEL, Hamzeh | ZAMURUYEV, Konstantin | DELPLANQUE, Jean-Pierre | KENYON, Nicholas J.
Priority Number: WO2013112893A1
IPC Current: A61B000508
Assignee Applicant: The Regents of the University of California
Title: INTEGRATED CONDENSER FOR COLLECTING DROPLETS | CONDENSEUR INTÉGRÉ POUR COLLECTE DE GOUTTELETTES
Usefulness: INTEGRATED CONDENSER FOR COLLECTING DROPLETS | CONDENSEUR INTÉGRÉ POUR COLLECTE DE GOUTTELETTES
Summary: Integrated condenser for collecting droplets, used in a micro-analyzer for on-chip micro-analysis.
Novelty: Integrated condenser for collecting droplets has outer surface region that facilitates aggregating and moving condensed droplets radially toward center of sampler surface and inner surface region that receives condensed droplets

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