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Vertical Comb Drive Torsional Microactuators And Fabrication Process Based On Self-aligned Plastic Deformation

Technology Benefits

Design is simple and ruggedFabrication is controllable, repeatable and eliminates critical alignment steps

Technology Application

Micro-mirror MEMS applications

Detailed Technology Description

None

Supplementary Information

Patent Number: US7089666B2
Application Number: US2004851543A
Inventor: Kim, Jongbaeg | Lin, Liwei
Priority Date: 6 Jun 2003
Priority Number: US7089666B2
Application Date: 20 May 2004
Publication Date: 15 Aug 2006
IPC Current: G02B002600 | G02B002608 | H02N000100
US Class: 0298969 | 029445 | 029447 | 310075A
Assignee Applicant: The Regents of the University of California
Title: Microfabricated vertical comb actuator using plastic deformation
Usefulness: Microfabricated vertical comb actuator using plastic deformation
Summary: Used for tilting a device structure of a vertical comb microelectromechanical system actuator.
Novelty: Vertical comb microelectromechanical system actuator`s device structure tilting method, involves deflecting structure of torsion springs on springs, and cooling springs to retain permanent deflection of device structure

Industry

Optics

Sub Group

Optical Element

Application No.

7089666

Others

Tech ID/UC Case

17298/2003-100-0

Related Cases

2003-100-0

Country/Region

USA

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