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Vertical Comb Drive Torsional Microactuators And Fabrication Process Based On Self-aligned Plastic Deformation

技术优势: Design is simple and ruggedFabrication is controllable, repeatable and eliminates critical alignment steps

*Abstract: Electrostatic comb-drives are used to make torsional actuators in numerous MEMS applications. However, the linkage- and hinge-designs of these actuators have reliability problems and limit maximum operation frequencies. Furthermore, existing designs are difficult to fabricate because the comb structures are challenging to align, or require elaborate wafer bonding, grinding, polishing and silicon anisotropic-etching processes.
To improve the performance and simplify the fabrication of torsion-bar microactuators, researchers at UC Berkeley have developed torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in simple, rugged single-crystal silicon and driven by vertical comb drives. The batch process is controllable, repeatable and does not include any critical alignment steps.
Using this design, MEMS scanning mirrors have been built that resonate at frequencies between 1.90 and 5.33KHz achieving scanning angles up to 19.2 degrees with driving voltages of 40Vdc plus 13Vac. After more that 5 billion cycles of continuous testing at the maximum scanning angle, the plastically deformed silicon torsion bars have not exhibited any degradation or fatigue.

*Principal Investigation: Name: Jongbaeg Kim
Department:

Name: Liwei Lin
Department:

附加资料: Patent Number: US7089666B2
Application Number: US2004851543A
Inventor: Kim, Jongbaeg | Lin, Liwei
Priority Date: 6 Jun 2003
Priority Number: US7089666B2
Application Date: 20 May 2004
Publication Date: 15 Aug 2006
IPC Current: G02B002600 | G02B002608 | H02N000100
US Class: 0298969 | 029445 | 029447 | 310075A
Assignee Applicant: The Regents of the University of California
Title: Microfabricated vertical comb actuator using plastic deformation
Usefulness: Microfabricated vertical comb actuator using plastic deformation
Summary: Used for tilting a device structure of a vertical comb microelectromechanical system actuator.
Novelty: Vertical comb microelectromechanical system actuator`s device structure tilting method, involves deflecting structure of torsion springs on springs, and cooling springs to retain permanent deflection of device structure

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