Permeable Polysilicon Thin Film Filter
May be manufactured using standard thin film deposition technologyFilter membranes are simpler and more economical to produceMembranes have pore diameter in 10nm - 50 nm range
Micromachined systems and other precision devicesSeparation of biological fluidsFiltration of liquids or gases containing entrained particlesSemipermeable membrane coverings for microsensors or other devices
None
Patent Number: US6780786B2
Application Number: US2001994280A
Inventor: Dougherty, George M.
Priority Date: 26 Nov 2001
Priority Number: US6780786B2
Application Date: 26 Nov 2001
Publication Date: 24 Aug 2004
IPC Current: B01D007102 | B81B000300 | H01L0021285 | H01L002916
US Class: 438758 | 21032184 | 21050025 | 257E21166 | 257E29082 | 4270023 | 427167 | 427574 | 438001 | 438022 | 438745 | 1566251 | 427719
Assignee Applicant: The Regents of the University of California
Title: Method for producing a porous silicon film
Usefulness: Method for producing a porous silicon film
Summary: In microelectrochemical system and precision device, for separation of plasma from blood, for filtering liquids or gases that contain entrained particles and for forming semipermeable membrane covering for microsensor and other devices.
Novelty: Filter membrane structure used for e.g. separation of plasma from blood, has conformal layer formed on silicon film having grain structure, to provide selected chemical or biological function
Chemical/Material
Chemical/Material Application
6780786
Tech ID/UC Case 17084/2001-106-0 Related Cases 2001-106-0
USA
