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Uniform Polycrystalline Thin Films for Use in High-Performance Thin-Film Transistors
Summary
James S. Im, Ph.D.
Technology Benefits
Produces more uniform films than conventional annealing methodsReduces the number of processing stepsCan be used on a variety of materials, including siliconCan be used in combination with a variety of film deposition methodsPatent Information:Patent Issued (US8,415,670)Tech Ventures Reference: IR M07-039
Technology Application
High-performance thin film transistorsActive matrix organic light emitting diode (AMOLED) AMOLED DisplaysActive matrix liquid crystal displays (AMLCDs)
Detailed Technology Description
James S. Im, Ph.D.
Country/Region
USA
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