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Multiple-Nozzle Thermal Evaporation Source
Detailed Technology Description
Theinvention (evaporation source) is an apparatus for evaporating bulk materials — elemental or compound — to form athin film on a moving substrate. The evaporation source consists of: (1) anevaporation chamber; (2) two or more effusion nozzles which direct the evaporatingmaterial from the evaporation chamber towards the substrate, and optionally;(3) an expansion chamber interposed between the evaporation chamber andeffusion nozzles.
Countries
United States
Application No.
6,562,405
Country/Region
USA
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