Multiple-Nozzle Thermal Evaporation Source
- 详细技术说明
- Theinvention (evaporation source) is an apparatus for evaporating bulk materials — elemental or compound — to form athin film on a moving substrate. The evaporation source consists of: (1) anevaporation chamber; (2) two or more effusion nozzles which direct the evaporatingmaterial from the evaporation chamber towards the substrate, and optionally;(3) an expansion chamber interposed between the evaporation chamber andeffusion nozzles.
- *Abstract
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None
- *Inquiry
- Denise BierleinUniversity of DelawareOffice of Economic Innovation and PartnershipsLicensing AnalystTelephone: 302-831-4005Email: deniseb@udel.edu
- *IP Issue Date
- None
- *IP Type
- Utility
- 国家
- United States
- 申请号码
- 6,562,405
- 国家/地区
- 美国
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