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Monitoring of surface roughness using laser hologram

Summary

This sensor system is mainly composed of a laser and charge couplded device. The laser hologram contains information regarding complex interactions between laser and film particles. The system is based on new concepts of light and interaction with the surface plasmon carriers. No existing sensors can do this. It is integral to real time monitoring of surface roughness in mass production sites.

Technology Benefits

This sensor can measure surface roughness of thin films in real time using laser hologram.

The rougness of all matter states including the plasma can be measured. This sensor can be appied to monitor real-time variations of film surface roughness in any matter states.

Application No.

WO2014069962

Coverage Areas

KOREA

Goods and Services

Sale, License agreement

Patent Information

Issued patent

Country/Region

Korea, Republic Of

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