Monitoring of surface roughness using laser hologram
- 总结
- This sensor system is mainly composed of a laser and charge couplded device. The laser hologram contains information regarding complex interactions between laser and film particles. The system is based on new concepts of light and interaction with the surface plasmon carriers. No existing sensors can do this. It is integral to real time monitoring of surface roughness in mass production sites.
- 技术优势
- This sensor can measure surface roughness of thin films in real time using laser hologram.
The rougness of all matter states including the plasma can be measured. This sensor can be appied to monitor real-time variations of film surface roughness in any matter states.
- 申请号码
- WO2014069962
- 覆盖范围
- KOREA
- 商品和服务
- Sale, License agreement
- 专利信息
- Issued patent
- 国家/地区
- 南韩
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