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Process and Apparatus for Fabricating Nano-Floatng Gate Memories and Memory Made Thereby
Summary
In a process for fabricating a nano-floating gate memory structure, a substrate and a nanocluster source are firstly provided. The nanocluster source is activated for generating a beam of nanoclusters towards the substrate, and at least part of the nanoclusters are received atop the substrate. Thereby, a plurality of nanoclusters of controllable size are formed atop the substrate.
Industry
Optics
Sub Group
Laser
Others
DAI Jiyan
LU Xubing
LEE Pui-fai
Country/Region
USA
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