Waveguide-integrated Photodiode in Deposited Silicon
- Detailed Technology Description
- This invention is a photodiode in polycrystalline silicon (polysilicon), a standard deposited material that can be integrated in the CMOS material stack.
- Others
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- K. Preston, Y.H. Lee, M. Zhang, and M. Lipson, "Waveguide-integrated telecom-wavelength photodiode in deposited silicon," Opt. Lett. 36,52-54 (2011).
- K. Preston, M. Zhang, and M. Lipson, "Waveguide-Integrated Photodiode in Deposited Silicon,"Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2010), paper IWF4.
- Issued US patents 8,861,909; 9,153,715
- *Abstract
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Silicon photonic circuits can provide high-bandwidth, low-power data transmission for many computing and communication applications. This invention is a photodiode in polycrystalline silicon (polysilicon), a standard deposited material that can be integrated in the CMOS material stack. The use of deposited silicon-based materials can enable new flexibility in system architecture and chip fabrication, for instance by eliminating the need for expensive silicon-on-insulator wafers, and the additional complex and costly processing for integrating germanium on silicon.
The Cornell photodetector can be coupled to a waveguide made from crystalline silicon, amorphous silicon, polysilicon, silicon nitride, silicon oxynitride, polymers, or other materials. The inventors demonstrated photodiodes in deposited polysilicon at 1550 nm wavelength with 0.15 A/W responsivity, 40 nA dark current, and 2.5 Gbps operation. They propose an interconnect scheme with modulators and photodetectors in the same deposited material.
Potential Commercial Applications:
- Long-range telecommunication networks
- Short-range computing, including chip-to-chip and on-chip optical interconnects
- Electronic readout for lab-on-a-chip sensing and spectroscopy
Advantages:
- CMOS compatibility
- Less manufacturing complexity
- Drive/receive circuit integration
- Increase in yield
- *Licensing
- Patrick Govangpjg26@cornell.edu(607) 254-2330
- Country/Region
- USA
