In-Situ Simultaneous Actuation and Displacement Sensing with Electrostatic Actuators Using Amplitude and/or Phase Modulation
- Detailed Technology Description
- An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal.
- Countries
- Not Available
- Application No.
- None
- *Abstract
-
An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent.
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- *IP Issue Date
- None
- *IP Type
- Other Patent
- Country/Region
- USA
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