In-Situ Simultaneous Actuation and Displacement Sensing with Electrostatic Actuators Using Amplitude and/or Phase Modulation
- 详细技术说明
- An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal.
- *Abstract
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An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent.
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- *IP Issue Date
- None
- *IP Type
- Other Patent
- 国家
- Not Available
- 申请号码
- None
- 国家/地区
- 美国
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