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Multiple-Nozzle Thermal Evaporation Source

Detailed Technology Description: Theinvention (evaporation source) is an apparatus for evaporating bulk materials — elemental or compound — to form athin film on a moving substrate. The evaporation source consists of: (1) anevaporation chamber; (2) two or more effusion nozzles which direct the evaporatingmaterial from the evaporation chamber towards the substrate, and optionally;(3) an expansion chamber interposed between the evaporation chamber andeffusion nozzles.

Countries: United States

Application No.: 6,562,405

*Abstract: None

*Inquiry: Denise BierleinUniversity of DelawareOffice of Economic Innovation and PartnershipsLicensing AnalystTelephone: 302-831-4005Email: deniseb@udel.edu

*IP Issue Date: None

*IP Type: Utility

Country/Region: USA

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