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The Resonant Body Transistor and Oscillator

Detailed Technology Description

A novel resonant body transistor (RBT) comprising a bulk-mode resonator with side-wall dielectric for capacitive drive and gate oxide sensing which is easier to fabricate and operates better than existing RBTs has been developed.

Others

Patent: 8,624,337
Patent application: 200880126205.7
Weinstein, Dana, Bhave, Sunil A. (2007, December 10-12). Internal dielectric transduction of a 4.5 GHz silicon bar resonator. IEEE International Electron Devices Meeting (IEDM 2007), Washington, DC, 415-418.
Weinstein, Dana, Sunil, Bhave A. (2008, June 1-5). Piezoresistive sensing of a dielectrically actuated silicon bar resonator. Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, 368-371.

Country/Region

USA

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