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3-D Composite Metallodielectric Nanoresonant Array Fabrication With Enhanced Sensing Abilities

Technology Benefits

Synergetic combination of two surface plasmonic resonances, propagating surface plasmon polariton (SPP) waves and localized surface plasmon resonant (LSPR) modes. Effective excitations and couplings of SPPs and LSPRs achieved by exciting SPPs, which propagate along the metallic surface, and couplings to LSPRs supported by the nanoresonant structures.  Nanoresonant structures are built over hole-array structures by depositing a controlled layer of metal at an oblique angle onto deeply perforated polymer film to realize controlled void diameter for excitation of LSPRs, while SPPs are excited by the periodic structure via the wave vector matching condition. Achievement of enhanced sensing applications in physical parameter and bio-recognition reactions.

Detailed Technology Description

The subject invention details a new surface plasmon-based sensing chip for array-based detection sensors for environmental monitoring; explosive detection; protein-protein interaction for genomics, pharmaceuticals, proteomics, disease discovery, and drug development; and physical parameter detection and monitoring, such as temperature, pressure, and surface deposition thickness

Supplementary Information

Patent Number: US8514398B2
Application Number: US2010943916A
Inventor: Pang, Lin | Chen, Haiping Matthew | Fainman, Yeshaiahu
Priority Date: 10 Nov 2009
Priority Number: US8514398B2
Application Date: 10 Nov 2010
Publication Date: 20 Aug 2013
IPC Current: G01N002155 | G01N002100 | H01J004900
US Class: 356445 | 250286 | 250297 | 356244 | 356301 | 42208205 | 42208211
Assignee Applicant: The Regents of the University of California
Title: Sensing devices and techniques using 3-D arrays based on surface plasmon excitations
Usefulness: Sensing devices and techniques using 3-D arrays based on surface plasmon excitations
Summary: Surface plasmon based sensing device for sensing and detecting different materials e.g. chemical and biological substances such as polymer resist material, electrically conductive material, dielectric material, gold material and self-assembled monolayer material.
Novelty: Surface plasmon based sensing device for sensing and detecting different materials e.g. polymer resist material, has metallic film layer formed on two-dimensional array of nanoholes to include openings over nanoholes

Industry

Electronics

Sub Category

Semiconductor

Application No.

8514398

Others

Related Materials

A detailed overview of this invention is available at the following link.

http://www.opticsinfobase.org/DirectPDFAccess/4ABCCB9D-BDB9-137E-CF19BA23ACBB882B_181077.pdf?da=1&id=181077&seq=0

Intellectual Property Information

This work is available for commercial development.

Tech ID/UC Case

19890/2009-261-0

Related Cases

2009-261-0

*Abstract

None

*IP Issue Date

Aug 20, 2013

*Principal Investigator

Name: Haiping Matthew Chen

Department:

Name: Yeshaiahu Fainman

Department:

Name: Lin Pang

Department:

Name: Pang Chen Sun

Department:

Country/Region

USA