Staggered Torsional Electrostatic Combdrive Micromirror
- Technology Benefits
- Exceptional scanning speed. Exceptional reliability. Constructed with MEMS processes. Diffraction-limited optical performance.
- Technology Application
- Laser printers.Raster-scanning projection video displays.
- Detailed Technology Description
- None
- Supplementary Information
- Patent Number: US7079299B1
Application Number: US2000584835A
Inventor: Conant, Robert A. | Nee, Jocelyn T. | Lau, Kam Yin | Muller, Richard S.
Priority Date: 31 May 2000
Priority Number: US7079299B1
Application Date: 31 May 2000
Publication Date: 18 Jul 2006
IPC Current: G02B002608 | B81B000300 | B81C000100
US Class: 3592241 | 359224 | 310309 | 3592006
Assignee Applicant: The Regents of the University of California
Title: Staggered torsional electrostatic combdrive and method of forming same
Usefulness: Staggered torsional electrostatic combdrive and method of forming same
Summary: For controlling a micromirror or paddle structure for mounted electronic components.
Novelty: Staggered torsional electrostatic combdrive for controlling micromirror has moving comb teeth assembly positioned entirely above stationary comb teeth assembly by predetermined vertical displacement during combdrive resting state
- Industry
- Optics
- Sub Category
- Optical Element
- Application No.
- 7079299
- Others
-
Tech ID/UC Case
16920/2000-045-0
Related Cases
2000-045-0
- *Abstract
-
While macro-scale mirrors are used in applications such as barcode readers, laser printers, and fiber-optic network components, macro-scale mirrors are too slow, consume too much power, are too expensive, and too bulky to be useful in portable systems.
This invention is a high-performance micro-electro mechanical system (MEMS) that can be used to control a micromirror or paddle for scanning. The invention has exceptional scanning speed, exceptional reliability (due to its simple structure), diffraction-limited optical performance, and can be produced cheaply.
The invention also includes a method to produce the device described.
- *IP Issue Date
- Jul 18, 2006
- *Principal Investigator
-
Name: Robert Conant
Department:
Name: KAM YIN LAU
Department:
Name: Richard Muller
Department:
Name: Jocelyn Nee
Department:
- Country/Region
- USA
