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Advanced Excimer-Laser-Annealing Method for Large OLED TV Manufacturing

Summary

In recent years, organic light-emitting diodes (OLEDs) have emerged as a prominent display technology. Efficient manufacturing of high quality thin-film transistors (TFT) is necessary for the production of organic light-emitting diode (OLED) based displays, with the quality of the TFT backplane directly affecting image quality. Low-temperature polycrystalline-Si (LTPS) TFT technology, in the form of excimer-laser-annealing (ELA), is an obvious candidate for OLED displays. Unfortunately, modern ELA methods are hindered by low efficiency in terms of manufacturing capabilities, which is especially problematic for large display applications such as OLED TVs. This technology is a novel ELA scheme, called advanced excimer-laser-annealing (AELA), which significantly increases the rate of crystallization, effectively raising the manufacturing efficiency and throughput. AELA takes advantage of the specific requirements of OLED displays to circumvent fundamental issues with the practicality of conventional ELA methods for use in commercial manufacturing. This technology may make the use of ELA for large OLED display manufacturing a realistic and practical solution for the production of high quality TFT backplanes.

Technology Benefits

Increased effective crystallization rate over traditional ELAEasily utilized in existing ELA manufacturing systemsAbility to satisfy multiple-shot requirement for high quality polycrystalline silicon filmsReduction in process time for crystallizing substratesPotential for differential crystallizationPatent Information:Patent Pending (WO/2013/172965)Tech Ventures Reference: IR CU12317

Technology Application

Manufacturing technology for OLED TVsFabrication of laptop, tablet, and mobile phone displaysUse in laser patterning and ablation Laser doping and activation for use in microfabrication

Detailed Technology Description

None

Country/Region

USA

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