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A System for Producing Patterned Silicon Carbide Structures


Technology Benefits

Cost EffectiveDoesnot require separate or extra production linesLoweroperational costsNoneed to construct isolated processing facilities to avoid contamination ofsilicon process linesMaterial PropertiesIncreasedradiation hardeningHighertemperature operation, nearly 3 times compared to siliconHigherSolar Efficiency, nearly 2 times the existing technologyPromisingoptical properties in the mid infrared band which could potentially serve as awaveguide in that frequency range


Detailed Technology Description

A method of forming patterned ceramic structures of silicon carbide filmby using a pre-ceramic polymer that is easy to work with and can be cured toform SiC


Country/Region

USA

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