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Optimized Vertical Power DMOSFETS in Silicon Carbide

Summary
Researchers at Purdue University have developed a structure and method of fabrication of a vertical DMOSFET in silicon carbide that achieves minimum on-state resistance and maximum breakdown voltage.
Technology Benefits
Increases breakdown voltage without increasing internal resistivityProvides consistent internal resistance at a greater operating temperature range
Technology Application
MaterialsManufacturing
Detailed Technology Description
James Cooper Jr.Purdue Electrical and Computer Engineering
Countries
United States
Application No.
7,498,633
*Abstract

*Background
An important feature in a vertical double-diffused metal oxide semiconductor field effect transistor (DMOSFET) is its ability to drive a load with minimal parasitic resistance at a given breakdown voltage. When the load is switched off, the maximum breakdown voltage is crucial. A DMOSFET produced using silicon carbide process material will have higher breakdown voltage than a DMOSFET produced in other process materials but often will have a higher parasitic resistance.
*IP Issue Date
Mar 3, 2009
*IP Type
Utility
*Stage of Development
Prototype Testing
*Web Links
Purdue Office of Technology CommercializationPurdueInnovation and EntrepreneurshipJames Cooper Jr.Purdue Electrical and Computer Engineering
Country/Region
USA

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