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Contact-Free Probe for Semiconductor Devices and Integrated Circuits
Technology Benefits
- Contact-free so the circuit-under-test is never damaged by the probe.- Antenna-free so the devices under test need no special design or fabrication.- Increased coupling with increasing frequency (particularly above 500 GHz), unlike the coupling in metal-to-metal contact probes.
Technology Application
- Characterization and measurement of semiconductor devices and integrated circuits, especially in the upper MM-wave to THz range.
Detailed Technology Description
None
Country/Region
USA
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