Flexible Capacitive Micromachined Ultrasonic Transducer Array with Increased Effective Capacitance
- Summary
- A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.
- Supplementary Information
- Patent Number: US8531919B2
Application Number: US2010885798A
Inventor: Cheng, Ching-Hsiang | Chao, Chen
Priority Date: 21 Sep 2009
Priority Number: US8531919B2
Application Date: 20 Sep 2010
Publication Date: 10 Sep 2013
IPC Current: H01L004108
US Class: 367181
Assignee Applicant: The Hong Kong Polytechnic University
Title: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
Usefulness: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
Summary: Used as a capacitive micromachined ultrasonic transducer.
Novelty: Capacitive Micromachined Ultrasonic Transducer (CMUT) comprises a membrane operatively connected to a top electrode and a bottom electrode having a concave void
- Industry
- Biomedical
- Sub Category
- Medical Imaging
- Others
- CHENG Ching-Hsiang
CHEN Chao
- Country/Region
- USA
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