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A Flexible Piezoresistive Interfacial Shear and Normal Force Sensor and Sensor Array
Summary
A force sensor includes a polymeric substrate including a cavity with a tilt plane, at least two metal piezoresistors on the tilt plane, and a contact pad connected to the metal piezoresistors. The tilt plane may include a measured interface of from 15° to 75°.
Industry
Electronics
Sub Group
Semiconductor
Others
CHENG Ching-Hsiang
Country/Region
USA
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