Method and Apparatus for Measuring Oscillation Amplitude of an Ultrasonic Device
- Summary
- An apparatus and method for detecting the oscillation amplitude of a bonding tool includes a sensing unit disposed adjacent to and at a distance from the bonding tool. The sensing unit includes a pair of electrodes, a piezoelectric sensing layer located between the pair of electrodes, and a membrane associated with the piezoelectric sensing layer. The piezoelectric sensing layer becomes sensitive to ultrasonic vibrations and generates electrical voltage signals after being activated by a poling process. An optional pre-amplifier is used to amplify the signals generated from the sensing unit, and an oscilloscope is used to further process the signals.
- Supplementary Information
- Patent Number: US7819013B2
Application Number: US2006481205A
Inventor: Chan, Helen Lai Wa | Lam, Tin Yan | Chao, Chen | Kwok, Kin Wing
Priority Date: 5 Jul 2006
Priority Number: US7819013B2
Application Date: 5 Jul 2006
Publication Date: 26 Oct 2010
IPC Current: B23K000106 | B23K002010
US Class: 073658 | 2280011 | 2281101
Assignee Applicant: The Hong Kong Polytechnic University
Title: Method and apparatus for measuring oscillation amplitude of an ultrasonic device
Usefulness: Method and apparatus for measuring oscillation amplitude of an ultrasonic device
Summary: Piezoelectric sensor for detecting an oscillation amplitude of a oscillating part of an ultrasonic device.
Novelty: Piezoelectric sensor for detecting oscillation amplitude of oscillating part of ultrasonic device, comprises two electrodes, and piezoelectric sensing layer sensitive to ultrasonic vibrations located between two electrodes
- Industry
- Biomedical
- Sub Category
- Medical Imaging
- Application No.
- US2006481205A
- Others
- CHAN WONG Lai-wah Helen
KWOK Kin-wing
LAM Tin-yan
CHAO Chen
- Country/Region
- USA
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