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Method of Making Diamond Nanopillars

IP Title
Method of Making Diamond Nanopillars
Summary

The extreme properties of diamond make it difficult to be structured to a desired geometry to fully explore its advantages in different applications. This novel method is capable of forming diamond nanopillars with great uniformity and high reproducibility, and the geometry and density of the nanopillars can be controlled. It is applicable to any structure of diamond films ranging from microcrystalline to nanocrystalline. Nano-sized metal dots serve as etching masks to prevent the etching of underneath diamond.
Technology Application

Diamond nanopillars have great potential applications in biomedical sensors, electrochemical microelectrodes, field emission devices, and probe testing instruments including scanning probe microscopy (SPM).
Application Date
12/03/2008
ID No.
12/046,673
Country/Region
Hong Kong

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