NANOSTRUCTURED MEMS COMPONENTS VIA FRICTION STIR SUPERPLASTIC FORMING
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Patent Number: US6655575B2
Application Number: US2002123326A
Inventor: Mishra, Rajiv S.
Priority Date: 16 Apr 2002
Priority Number: US6655575B2
Application Date: 16 Apr 2002
Publication Date: 2 Dec 2003
IPC Current: B21C002301 | B21C002502 | B21C002700 | B21C002900 | B21C002902 | B21J000106 | B21J000500 | B21J001308 | C22F000100
US Class: 2281121 | 228113 | 2281411 | 2281731 | 977700 | 977776 | 977900
Assignee Applicant: The Curators of the University of Missourilumbia
Title: Superplastic forming of micro components
Usefulness: Superplastic forming of micro components
Summary: For formation of miniaturized shaped component, such as components for micro-electromechanical systems and nanoelectromechanical systems.
Novelty: Formation of miniaturized shaped component for e.g. nanoelectromechanical systems, by frictionally heating bulk superelastic material with heat by frictional contact with rotation tool, and forcing material into microfabricated die
生物医学
医疗植入
美国
