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NANOSTRUCTURED MEMS COMPONENTS VIA FRICTION STIR SUPERPLASTIC FORMING

Detailed Technology Description

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Supplementary Information

Patent Number: US6655575B2
Application Number: US2002123326A
Inventor: Mishra, Rajiv S.
Priority Date: 16 Apr 2002
Priority Number: US6655575B2
Application Date: 16 Apr 2002
Publication Date: 2 Dec 2003
IPC Current: B21C002301 | B21C002502 | B21C002700 | B21C002900 | B21C002902 | B21J000106 | B21J000500 | B21J001308 | C22F000100
US Class: 2281121 | 228113 | 2281411 | 2281731 | 977700 | 977776 | 977900
Assignee Applicant: The Curators of the University of Missourilumbia
Title: Superplastic forming of micro components
Usefulness: Superplastic forming of micro components
Summary: For formation of miniaturized shaped component, such as components for micro-electromechanical systems and nanoelectromechanical systems.
Novelty: Formation of miniaturized shaped component for e.g. nanoelectromechanical systems, by frictionally heating bulk superelastic material with heat by frictional contact with rotation tool, and forcing material into microfabricated die

Industry

Biomedical

Sub Category

Medical Implant

Others

*Abstract

Abstract of US Patent 6,655,575- Superplastic forming of micro components: A method for forming a miniaturized shaped component. Bulk superplastic material is contacted with a flat rotating surface of a rotating tool to frictionally heat the bulk superplastic material with the bulk superplastic material positioned between the flat rotating surface of the tool and a microfabricated tool die. The bulk superplastic material is forced into the microfabricated die once the bulk superplastic material is heated to a temperature between a glass transition temperature and a crystallization temperature.Non-confidential Abstract of Invention: Micro-electromechanical systems (MEMS) require fabrication of very small components and systems. MEMS microfabrication techniques usually involve micromachining and are based on Si or IC technology. Conventional metal forming techniques such as forging or extrusion cannot be miniaturized to the MEMS scale easily. New metallic glasses and nanostructured materials that exhibit superplastic behavior provide new opportunities to develop conventional metal forming for MEMS components. This invention integrates a new metal forming concept with superplastic behavior of metallic glasses and nanostructured materials to microfabricate MEMS components by forging or extrusion.

*Principal Investigator

Name: Rajiv Mishra, Associate Professor of Metallurgical Engineering

Department:

Country/Region

USA