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Monolithic Bulk-piezoelectric Actuators and Precision Motion Stages
Detailed Technology Description
Monolithic actuators that provide both in-plane and out-of-plane motion, unlike traditional unimorph orbimorph piezoelectric actuators which yield only motion along one direction, were fabricated from piezoelectric plates using a low-cost, high-throughput laser process.
Others
US patent application 14/785,442
Country/Region
USA
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