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Monolithically Integrated MEMS Devices and Electronics on Silicon Carbide

Detailed Technology Description

Cornell has successfully built monolithically integrated silicon carbide (SiC) microelectromechanical (MEMS) and electronics.

Others

Patents: 7,170,141; 1487738; 7,615,788; EP1487738
E. Hailu, A. R. Atwell, J. S. Duster, C. Li, M.Balseanu and K.T. Kornegay, "The MonolithicIntegration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh EnvironmentApplications", Nanotech 2003 Conference Technical Proceedings.

Country/Region

USA

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