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MEMS Resonators with Increased Quality Factor

Technology Application

Filters for RF channel-selecting that can enable practical software-defined cognitive radio;Ultra-low noise oscillators for timing, radar, navigation, and communication -- where higher Q correlates with lower noise and therefore wider application range; Gyroscopes, accelerometers, and inertial measurement devices -- that use resonating elements such as MEMS-based gyroscopes in automobiles, mobile handsets and gaming wands; Sensors that use resonating elements (see aforementioned inertial measurement devices), and also sensors for gas, temperature, pressure, motion, and stress, etc; High Q tank circuits used in communications as well as other integrated circuits.

Detailed Technology Description

None

Industry

Biomedical

Sub Group

Medical Device

Application No.

9077060

Others

Additional Technologies by these Inventors

Tech ID/UC Case

22016/2012-039-0

Related Cases

2012-039-0, 2009-068-2, 2009-019-1, 2008-081-2, 2008-031-2, 2007-118-1

Country/Region

USA

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