Contour-mode Piezoelectric Resonators
Permits the fabrication of microresonators arrays with different frequencies on a single chip.Can operate in air without significant performance losses thereby reducing packaging costs.Enables a single chip to provide low motional resistance and high quality factor while spanning a MHz to GHz frequency range.Potentially allows fine and coarse tuning of center frequencies directly on-chip without the need of any extra post-processing step.
Micromechanical resonators for use as building blocks in wireless communications components such as filters and oscillators.
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Patent Number: US7492241B2
Application Number: US2005145552A
Inventor: Piazza, Gianluca | Stephanou, Philip J. | Pisano, Albert P.
Priority Date: 2 Jun 2005
Priority Number: US7492241B2
Application Date: 2 Jun 2005
Publication Date: 17 Feb 2009
IPC Current: H03H000900 | H01L004108 | H03H000954 | H01L0041053
US Class: 333189 | 310321 | 333187
Assignee Applicant: The Regents of the University of California
Title: Contour-mode piezoelectric micromechanical resonators
Usefulness: Contour-mode piezoelectric micromechanical resonators
Summary: Used for a wireless communication component e.g. filter and oscillator.
Novelty: Micromechanical piezoelectric resonator for e.g. filter, has alternating electric field applying unit applying alternating electric field, where electric field causes resonator to have contour mode in-plane lateral displacement
Electronics
Semiconductor
7492241
Tech ID/UC Case 17451/2005-014-0 Related Cases 2005-014-0
USA
