AsiaIPEX is a one-stop-shop for players in the IP industry, facilitating IP trade and connection to the IP world. Whether you are a patent owner interested in selling your IP, or a manufacturer looking to buy technologies to upgrade your operation, you will find the portal a useful resource.

Back to search results

Thin Film Crystal Growth By Laser Annealing

Technology Benefits

Improved electrical properties of the resulting TFTDoes not require fabrication of a mask structure over the amorphous siliconProvides control over both the length and directionality of crystal growth

Technology Application

Active matrix liquid crystal displaysField emission displaysOrganic light emitting diode displaysOptical sensors

Detailed Technology Description

None

Supplementary Information

Patent Number: US6451631B1
Application Number: US2000637325A
Inventor: Grigoropoulos, Costas P. | Hatano, Mutsuko | Lee, Ming Hong | Moon, Seung Jae
Priority Date: 10 Aug 2000
Priority Number: US6451631B1
Application Date: 10 Aug 2000
Publication Date: 17 Sep 2002
IPC Current: H01L002120 | H01L0021268 | H01L0021336 | H01L0029786
US Class: 438149 | 257E21134 | 438487
Assignee Applicant: Hitachi America Ltd.,Brisbane | The Regents of the University of California,Oakland
Title: Thin film crystal growth by laser annealing
Usefulness: Thin film crystal growth by laser annealing
Summary: For forming thin film crystal for thin film transistor manufacture, for flat panel active matrix liquid crystal display, field emission display, organic EL display. Also for manufacture of photosensor, etc.
Novelty: Thin film crystal formation using laser annealing, e.g. for thin film transistor (TFT) manufacture, involves irradiating amorphous silicon layer with two sets of laser beams to form polycrystalline silicon layer with larger grain size

Industry

Optics

Sub Group

Laser

Application No.

6451631

Others

Related Technologies

Method For Constructing Structures Using Nanoparticles

Tech ID/UC Case

16953/2000-079-0

Related Cases

2000-079-0

Country/Region

USA

For more information, please click Here