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Method for Fabrication of Monolithic Nanometer Spaced Tunnel Junctions
Detailed Technology Description
This invention is a method to fabricate monolithic (i.e.single substrate) metal-medium-metal tunnel junctions where the medium could beair, liquid, or vacuum, for example. If molecules are present in the medium, they may be detected by atunneling spectroscopy such as IETS.
Countries
United States
Application No.
7,868,426
Country/Region
USA
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