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Nonlinear Microresonator Mass Sensor

Summary

Researchers at Purdue University have developed a new resonating mass sensor that improves the precision of this type of sensor. Instead of measuring the change in frequency, which provides a linear measurement, this new design measures the activation voltage that is needed to return the sensor to its natural resonance. This provides a nonlinear measurement, which can be used to calculate the attached mass better than frequency shift measurements. The resonator performance is also independent of the quality factor (except in higher voltages) and improves the accuracy of the device. Simulations predict that this new type of sensor would allow sub-picogram masses to be measured, not possible until now.

Technology Benefits

Nonlinear measurement improves precisionIndependent of quality factorSub-picogram measurements possible

Technology Application

Nanoelectronics

Detailed Technology Description

Anil BajajPurdue Mechanical Engineering

Countries

United States

Application No.

7,726,189

Country/Region

USA

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