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Contactless Probe for Electrical Characterization of Buried Conducting Layers
Technology Benefits
• Rapid and time-efficient (seconds vs. days) • Non-destructive: No need to cut test samples. Samples are reusable. • High throughput capability • Independent of material, carrier type and carrier density
Detailed Technology Description
Proximity probe that measures the conductivity of a buried conducting layer in transistor substrates#instrumentation #analytical
Country/Region
USA
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