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An Ultra Sensitive Pressure Sensor Embedded in a Polymer Diaphragm
Detailed Technology Description
This invention is an ultra sensitive pressure sensor consisting of carbon nanotubes embedded in a polymer diaphragm. During sensing, the pressure difference across the diaphragm causes it to deflect, changing the geometry and spacing of the enclosed carbon nanotubes. This allows extremely accurate pressure detection of up to 1 Pascal, simply by measuring the resistance and change within the sensor.
Countries
United States
Application No.
9,099,224
Country/Region
USA
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