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Roll-to-Roll Synthesis of Silicon Thin Films from Liquid Silanes
Technology Benefits
Roll-to-roll, ambient pressure, low temperature, high deposition rate Soluble dopants allow degenerately doped Si thin films without PH3 and B2H4 Plasma free synthesis of a-SiNx thin films Vapor-Liquid-Solid based growth of Si nanowires and nanomaterials embedded Si thin films
Technology Application
This invention has applicability in the photovoltaics, microelectronics, Li-ion battery (anode), photovoltaic, display, optoelectronic devices and biomedical market.
Detailed Technology Description
None
Country/Region
USA
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